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期刊论文

时间:2012-11-18

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第一作者

 

论文期刊

  1.  

杨晋玲

Fracture properties of LPCVD silicon nitride and thermally grown silicon oxide thin films from the load-deflection of long Si3N4 and SiO2/Si3N4 diaphrams

IEEE J. Microelectromech. Syst. 17 (5): 1120–1134 (2008)

 

  1.  

杨晋玲

Fracture properties of thermal silicon oxide thin films from the load-deflection of long SiNx’/SiO2 membranes

IEEE Review on Advances in Micro, Nano and Molecular System, 1: 621-625 (2006)

  1.  

杨晋玲

Miniaturized single-crystal silicon cantilevers for scanning force microscopy

Appl. Phys. Lett. 86 (13): 134101-1–134101-3 (2005)

  1.  

C. Leung, A. Bestembayeva, J. L. Yang,

Atomic force microscopy with nano-scale cantilevers resolves different structural conformations of the DNA double helix

Nano Lett. 12, 3846 (2012)

  1.  

刘雯

Surface plasmon enhanced GaAs thin film solar cells

Sol. Energy Mater. Sol. Cells, 95, 693, (2011)

  1.  

刘雯

Long-range-ordered Ag nanodot arrays grown on GaAs substrate using nanoporous alumina mask

Mater. Sci. Semicond. Process (accepted)

  1.  

张加勇

Fully lithography independent fabrication of nanogap electrodes for lateral phase-change random access memory application

Applied Physics Letters 96, 213505 2010

  1.  

马慧莉

Self-aligned process for phase-change material nanowire confined within electrode nanogap

Applied Physics Letters 99 (2011) 173107

  1.  

刘云飞

An effective approach for restraining electrochemical corrosion of polycrystalline silicon caused by an HF-based solution and its application for mass production of MEMS devices

J. Micromech. Microeng. 22, 035003 (2012)

  1.  

刘云飞

An effective approach for restraining galvanic corrosion of polycrystalline silicon by hydrofluoric-acid-based solutions

IEEE J. Microelectromech. Syst. 20 (2) : 460–465 (2011)

  1.  

朱银芳

Stability of mechanical properties for submicrometer single-crystal silicon cantilever under cyclic load

IEEE J. Microelectromech. Syst. 20 (1): 178–183 (2011)

  1.  

张严波

Experimental Study on the Subthreshold Swing of Silicon Nanowire Transistors

Journal of Nanoscience and Nanotechnology10(11), p.7113-7116 2010

  1.  

张严波

Low-Temperature Performance of Accumulation-Mode p-Channel Wrap-Gated FinFETs

Journal of Nanoscience and Nanotechnology, Vol. 12, 1–4, 2012

  1.  

张加勇

Selective and lithography-independent fabrication of 20 nm nano-gap electrodes and nano-channels for nanoelectrofluidics applications

Nanotechnology 21 (2010) 075303

  1.  

张加勇

Understanding of Thermal Engineering for Vertical Nanowire Phase-Change Random Access Memory Partially Wrapped by Low-conductivity Layer

Japanese Journal of Applied Physics 51 (2012) 024302

  1.  

杜彦东

T-shaped gate AlGaN/GaN HEMTs fabricated by femtosecond laser lithography without ablation

Applied Physics A (2012) 106:575–579

  1.  

杜彦东

Femtosecond laser lithography technique for submicron T-gate fabrication on positive photoresist

Optical Engineering Vol. 51, No. 05, 2012.

  1.  

徐锐

Dielectric layer-dependent surface plasmon effect of metallic nanoparticles on silicon substrate

Chinese Phys. B,

21, 025202, (2012)

  1.  

徐锐

Optimization of the dielectric layer thickness for surface plasmon induced light absorption for silicon solar cells

Jpn. J. Appl. Phys.,

51 (2012) 042301

  1.  

徐锐

Efficiency improvement in solar cells using plasmonic nanoparticle and antireflection film

Optics Express,

20 (2012) 5601

  1.  

李越强

Observation of N-Shaped Negative Differential Resistance in GaAs-Based Modulation-Doped Field Effect Transistor with InAs Quantum Dots

Jpn. J. Appl. Phys.,

49, 104002, (2010)

  1.  

李越强

Optically induced current

oscillation in a modulation-dopedfield-effect transistor embedded with InAs quantum dots

Physica E.,

44 (2011) 686

  1.  

周威

Bulge testing and fracture properties of plasma-enhanced chemical vapor deposited silicon nitride thin films

Thin Solid Films 517 (6): 1989–1994 (2009)

  1.  

周威

Fracture properties of silicon carbide thin films by bulge test of long rectangular membrane

IEEE J. Microelectromech. Syst. 17 (2): 453–461 (2008)

  1.  

毛旭

Two new methods to improve the lithography precision for SU-8 photoresist on glass substrate

J. Microelectromech. Syst.,2012, (Accept)

  1.  

毛 旭

The Research on Growth Temperature of Ge/Si Thin Films Grown by Magnetron Sputtering

Rare Metal Materials And Engineering 35: 564-566 Suppl. 3, DEC 2006

  1.  

赵晖

Improvement of fabrication and characterization methods for micromechanical disk resonators

Chin. Phys. B 21, (2012)

  1.  

付英春

A Self-Aligned Process to Fabricate a Metal Electrode-Quantum

Dot/Nanowire-Metal Electrode Structure with 100% Yield

CHIN. PHYS. LETT. Vol. 29, No. 9 (2012) 098102

  1.  

徐晓娜

Double-peak N-shaped Negative Differential Resistance in a Quantum Dot Field Effect Transistor

Chin. Phys. Lett.

29, 087303, (2012)

  1.  

韩伟华

Detection of Terahertz photon by GaAs-based single electron transistor at low temperatures

Journal of Semiconductors, 28(4), pp. 500-506,2007.

  1.  

颜伟

Analysis on ohmic contact of Ti/Al/Ni/Au to AlGaN/GaN HEMT by multi-step annealing process

Journal of Semiconductors, Vol33, No.6, 2012

  1.  

王颖

An efficient dose-compensation method for proximity effect correction

Journal of Semiconductors, 2010, 31(8): p.086001

  1.  

张杨

Reduction of proximity effect in fabricating nanometer-spaced nanopillars by two-step exposure

Journal of Semiconductors, Vol. 30, No. 11, 2009,p.116001

  1.  

张严波

On the drive current of accumulation-mode p-channel SOI based wrap-gated Fin-FETs

Journal of Semiconductors, 32(3),094001, 2011.

  1.  

李艳

Lithography-independent and large scale fabrication of a metal electrode nanogap

Journal of Semiconductors,

2009,096003

  1.  

程凯芳

Simple and low-cost fabrication of a metal nanoplug on various substrates by electroless deposition

Journal of Semiconductors 2011, 32(4): 046001

  1.  

杨香

Fabrication of Silicon Crystal-Facet-Dependent Nanostructures by Electron-Beam Lithography

Journal of Semiconductors, 29(6),2008,p15-19.

  1.  

张逢新

Sensitive detection of infrared photons using a high-Q microcantilever

Journal of Semiconductors 32: 094010–094013 (2011)

  1.  

解静

Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications

Journal of Semiconductors 30 (8): 083003 (2009)

  1.  

唐龙娟

Dependence of wet etch rate on deposition, annealing conditions and etchants for PECVD silicon nitride film

Journal of Semiconductors 30 (9):096005 (2009)

  1.  

赵永梅

Heteroepitaxial Growth of 3C-SiC Films on Maskless Patterned Silicon Substrates

Journal of Semiconductors, 29, 12542008

  1.  

王亮

Laterally electrostatically driven poly 3C-SiC folded-beam resonant microstructures

Journal of Semiconductors, 29, 1453-1456, (2008)

  1.  

刘雯

Optimization of grid design for solar cells

Journal of Semiconductors, 31, 014006, (2010)

  1.  

韩国威

Feed-through cancellation of MEMS filter using difference method and analysis of the induced notch

Journal of Semiconductors, accepted

  1.  

司朝伟

Quality factor optimization

techniques for MEMS

gyroscopes of frame structures

Advanced Materials

Research,  590 (2012)

  1.  

赵永梅

Fabrication and characterisation of polysilicon-based clamped-clamped filter

Key Engineering Materials, 483, 112 (2011)

  1.  

张杨

Fabrication of nanoscale

metallic air-bridges by introducing a SiO2 sacricial layer.

Materials Science

in Semiconductor Processing, 2007; 10: 194-199

  1.  

韩伟华

微纳加工技术在光电子领域的应用

物理, 35, 1, 51 -54. 2006

  1.  

杜彦东

增强型AlGaN/GaN HEMT器件工艺的研究进展

半导体技术, 36(10), p771-777, 2011

  1.  

张严波

硅纳米线场效应晶体管的研究进展

《微纳电子技术》4611期,200911月,pp.641-648

  1.  

陈燕坤

硅基太阳能电池的表面纳米织构及制备

微纳电子技术, 49(6), p.388-395, 2012.

  1.  

陈燕坤

突破衍射极限的表面等离子体激元

光电技术应用, 26(4), pp.39-44,2011

  1.  

李小明

纳米MOSFET的多栅结构和应变硅纳米线结构

微纳电子技术,48(11), p.689-696, 2011

  1.  

颜伟

AlGaN/GaN HEMT器件工艺的研究进展

微纳电子技术, 48(2), p.79-86, 2011

  1.  

熊莹

一种脉冲编码CMOS神经元电路的设计与实现

电子器件, 34(3), p286-291,2011

  1.  

张杨

硅基单电子晶体管的制备,

微纳电子技术, 43, 2, 73 -772006

  1.  

付英春

侧墙技术在相变存储器中的应用

微纳电子技术, 49,5, 328 -3352012

  1.  

毛旭

采用防Footing工艺加工的SOI 微加速度计

纳米技术与精密工程 8, 330-333 , 2010

  1.  

毛旭

二维硅微机械陀螺的研究

压电与声光,293),298-3012007

  1.  

毛旭

Ge/Si薄膜材料生长的偏压效应研究

功能材料32(6) 614-6162001

  1.  

宁瑾

4H-SiC MESFET器件的制备与性能

半导体学报,第28卷增刊,385 (2007)

  1.  

王亮

SiSiC 微通道及其制备工艺

微纳电子技术, 45, 4582008

  1.  

康中波

基于谐振原理的RF MEMS滤波器的研制

微纳电子技术,492012, 4672012

  1.  

杨挺

立方相SiC MEMS器件研究进展

微纳电子技术,47, 4152010

  1.  

李越强

内嵌InAs量子点的场效应晶体管特性研究

功能材料与器件学报

1612345(2010)

  1.  

王晓东

高效多结太阳能电池技术及研究现状

半导体制造,2008年第10月期

  1.  

宋亮

基于LT3496的可调光大功率LED照明

电源技术

  1.  

宋亮

光伏电池MPPT扰动观察法的研究现状

半导体光电

 

 

 


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